Publication Type Journal Article
Title Low temperature chemical vapor deposition of V-C-N type coatings using bis(arene)vanadium
Authors S Abisset F Maury L Pelletier José M. Carretas AP de Matos
Groups IOARC
Journal ANNALES DE CHIMIE-SCIENCE DES MATERIAUX
Year 1998
Month July
Volume 23
Number 5
Pages 695-706
Abstract Vanadium carbide coatings V8C7 have been deposited on steel substrates by MOCVD using bis(arene)vanadiums as precursors at temperatures lower than 550 degrees C. Addition of C6Cl6 in the gas phase allows to reduce the carbon content of the films to 13 at. \%. These metal coatings exhibit the features of a metastable carbon-rich solid solution. Carbonitride V(C,N) and nitride delta-VN layers with only 5 at. \% carbon have been deposited in the presence of NH3. These reactive gas phases allow to grow almost all the phases of the V-C-N ternary diagram.
DOI http://dx.doi.org/10.1016/S0151-9107(99)80017-8
ISBN
Publisher
Book Title
ISSN 0151-9107
EISSN
Conference Name
Bibtex ID ISI:000075704300006
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