Publication Type |
Journal Article |
Title |
Low temperature chemical vapor deposition of V-C-N type coatings using bis(arene)vanadium |
Authors |
S Abisset F Maury L Pelletier José M. Carretas AP de Matos |
Groups |
IOARC |
Journal |
ANNALES DE CHIMIE-SCIENCE DES MATERIAUX |
Year |
1998 |
Month |
July |
Volume |
23 |
Number |
5 |
Pages |
695-706 |
Abstract |
Vanadium carbide coatings V8C7 have been deposited on steel substrates by MOCVD using bis(arene)vanadiums as precursors at temperatures lower than 550 degrees C. Addition of C6Cl6 in the gas phase allows to reduce the carbon content of the films to 13 at. \%. These metal coatings exhibit the features of a metastable carbon-rich solid solution. Carbonitride V(C,N) and nitride delta-VN layers with only 5 at. \% carbon have been deposited in the presence of NH3. These reactive gas phases allow to grow almost all the phases of the V-C-N ternary diagram. |
DOI |
http://dx.doi.org/10.1016/S0151-9107(99)80017-8 |
ISBN |
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Publisher |
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Book Title |
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ISSN |
0151-9107 |
EISSN |
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Conference Name |
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Bibtex ID |
ISI:000075704300006 |
Observations |
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