Publication Type Journal Article
Title Improving the Lubrication of Silicon Surfaces Using Ionic Liquids as Oil Additives: The Effect of Sulfur-Based Functional Groups
Authors Monica Antunes Mariana T. Donato Victoria Paz Fernando Caetano Luís Santos Rogério Colaço Luis C. Branco Benilde Saramago
Groups MET
Year 2020
Month May
Volume 68
Number 2
Abstract The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C4SO3H)MIM][TfO], thiamine triflate [Thiamine][TfO](2), 1-ethyl-3-methylimidazolium camphorsulfonate [C2MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C-1-3pic][MeSO4], methylimidazolium methanesulfonate [HMIM][MeSO3], and tetramethylguanidine methanesulfonate [TMG][MeSO3]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO4](-) and [MeSO3](-). The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces.Graphical Abstract
Book Title
ISSN 1023-8883
EISSN 1573-2711
Conference Name
Bibtex ID ISI:000536411000001
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