Publication Type Journal Article
Title Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation
Authors Rui M. Almeida L. F. Santos Amanda Simens Ashtosh Ganjoo Himanshu Jain
Groups
Journal JOURNAL OF NON-CRYSTALLINE SOLIDS
Year 2007
Month June
Volume 353
Number 18
Pages 2066-2068
Abstract GeSe2 and Ge28Sb12Se60 chalcogenide glass thin films have been deposited on single crystal silicon substrates by vacuum thermal evaporation. The surface morphology of these films has been investigated by field emission-scanning electron microscopy and atomic force microscopy, revealing heterogeneities in their microstructure consisting of granular regions similar to 15-50 nm in size, which were coarser in the case of the GeSe films. Typical RMS film surface roughness values were similar to 0.9-1.3 nm. (c) 2007 Elsevier B.V. All rights reserved.
DOI http://dx.doi.org/10.1016/j.jnoncrysol.2007.02.044
ISBN
Publisher
Book Title
ISSN 0022-3093
EISSN
Conference Name
Bibtex ID ISI:000247330600071
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