Publication Type Journal Article
Title New Stress Activation Method for Kerfless Silicon Wafering Using Ag/Al and Epoxy Stress-Inducing Layers
Authors Pierre Bellanger M. C. Brito David M. Pera Ivo Costa Guilherme Gaspar Roberto Martini Marteen Debucquoy Joao Serra
Groups
Journal IEEE JOURNAL OF PHOTOVOLTAICS
Year 2014
Month September
Volume 4
Number 5
Pages 1228-1234
Abstract The SLIM-cut technique provides a way to obtain thin silicon foils without a standard sawing step, thus avoiding kerf losses. This process consists of three steps: depositing a stress-inducing layer on top of the silicon surface; stress activation by heating and cooling, resulting in crack propagation in the silicon and detachment of a thin silicon layer; and a chemical cleaning to remove the stress-inducing layer. This paper describes a new stress activation method using Ag/Al and epoxy stress-inducing layers. The crack propagation is controlled along the sample length in order to avoid unwanted additional crack formation and interaction with other crack fronts. Silicon foils with thickness ranging between 50 and 130 mu m were obtained with effective lifetimes between 1 and 81 mu s.
DOI http://dx.doi.org/10.1109/JPHOTOV.2014.2334893
ISBN
Publisher
Book Title
ISSN 2156-3381
EISSN
Conference Name
Bibtex ID ISI:000344542500008
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