Publication Type Journal Article
Title Understanding the sprayed boric acid method for bulk doping of silicon ribbons
Authors J. A. Silva David M. Pera M. C. Brito Jorge Maia Alves Joao Serra A. M. Vallera
Groups
Journal JOURNAL OF CRYSTAL GROWTH
Year 2011
Month July
Volume 327
Number 1
Pages 221-226
Abstract The sprayed boric acid (SBA) method for bulk doping of silicon ribbons is investigated. Experimental procedures and main results are reviewed. Computational fluid dynamics and experimental tests using partial spraying suggest the role of gas transported evaporated boron oxide to explain the boron incorporation profiles along the sample. The industrial applicability of the SBA method is discussed. (C) 2011 Elsevier B.V. All rights reserved.
DOI http://dx.doi.org/10.1016/j.jcrysgro.2011.05.014
ISBN
Publisher
Book Title
ISSN 0022-0248
EISSN
Conference Name
Bibtex ID ISI:000293551100035
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